Electrical Properties of c-axis oriented PZT Thin Films by Electric-Field-Assisted Annealing

Abstract

We successfully deposited the c-axis oriented PZT thin films with different compositions by inserting the c-axis oriented PZT seeding layer, which was deposited by the electric-field-assisted annealing (EFA-A), between the electrode and PZT precursor films derived from molecular-designed precursor solutions with different compositions. The electrical properties for the resulting PZT thin films were investigated to show the relation between the orientations and electrical properties. As a result, electrical properties, especially, the piezoelectricity exhibited the large dependence on the film orientation. PZT thin films with c-axis orientation showed higher piezoelectricity than those for the films with (001)&(100)-orientation.