Abstract
We found that PCS fiber as a SiC precursor could be cured by EB oxidation only surface part of the fiber, and developed the hollowing process after curing of the PCS fiber by extracting of the un-crosslinked core. The diameter and wall thickness of the SiC micro tube could be controlled by the temperature, oxygen pressure and irradiation dose rate during EB curing. This presentation describe about these synthesis mechanisms and suitable conditions.