Direct Micropatterning by Laser-Induced Pyrolysis of Sol-Gel-Derived BaTiO3 Films Seeded with BaTiO3 Crystalline Nanoparticles

Kenshi Miyajima; Yoshio Kobayashi; Akira Watanabe; Mikio Konno

doi:10.14853/pcersj.2005F.0.212.0

18th Fall Meeting of The Ceramic Society of Japan & 1st Asia-Oceania Ceramic Federation (AOCF) Conference

Session ID : 1P06

DOI https://doi.org/10.14853/pcersj.2005F.0.212.0

Conference information

Host: The Ceramic Society of Japan

Direct Micropatterning by Laser-Induced Pyrolysis of Sol-Gel-Derived BaTiO₃ Films Seeded with BaTiO₃ Crystalline Nanoparticles

*Kenshi Miyajima, Yoshio Kobayashi, Akira Watanabe, Mikio Konno

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Keywords: BaTiO₃, Laser-induced pyrolysis, A nm-seeding technique, Sol-gel, Dielectric film, Micropatterning

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Abstract

A method for direct patterning of dielectric BaTiO₃ (BT) films is proposed, which applies lased-induced pyrolysis (LIP) method for BT crystallites-seeded sol-gel BT films with the use of polyvinylpyrollidone (PVP) as stabilizer for BT particles dispersed in precursor solution. An Ar ion laser beam was focused and scanned on the sol-gel-derived films, which induced pyrolysis and crystallization of the films with spatially selectivity. Micropatterns with a width of ca. 5 micrometer of crystalline BT films were well formed at PVP concentration of 25 g/l - 50 g/l.

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