High frequency dielectric permittivity mapping using un-contact probe for dielectric materials

Hirofumi Kakemoto; Satoshi Wada; Takaaki Tsurumi; 南 ソンミン

doi:10.14853/pcersj.2005F.0.278.0

18th Fall Meeting of The Ceramic Society of Japan & 1st Asia-Oceania Ceramic Federation (AOCF) Conference

Session ID : 1PD25

DOI https://doi.org/10.14853/pcersj.2005F.0.278.0

Conference information

Host: The Ceramic Society of Japan

High frequency dielectric permittivity mapping using un-contact probe for dielectric materials

*Hirofumi Kakemoto, Satoshi Wada, Takaaki Tsurumi, [in Japanese]

Author information

Keywords: Dielectric permittivity mapping, High frequency measurement

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

Reflection intensity for Al2O3 (1000) and SrTiO3 (1000) single crystals was measured up to 8.5GHz using a non-contact state micro-probe. The micro-probe was prepared by Pt and sized 6mm for diameter. Reflection intensity measurement was carried out as a function of distance between sample and probe, and reflection intensity minimum point was observed. In addition, in-plane reflection intensity mapping was also measured with non-contact state micro-probe.

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