Integrated Circuits and Microsensor Systems for High Temperature Environments Realized by SOI-CMOS Technology

Abstract

Integrated sensor systems can realize many kinds of new functions for various sensing applications. However, usual silicon devices can not be operated under high temperature environments over 125~150ºC. Temperature tolerant smart micro sensing system has been demanded in various application fields for reliable control system operated over a high temperature range. In this study, temperature stabilized micro accelerometer and leak-compensated precision autozeroed operational amplifier have been investigated for high temperature smart sensing system using SOI (Silicon On Insulator) technology. Integrating SOI sensors and processing circuits with the technology developed, precision smart microsensor systems with high temperature stability can be realized in a microchip configuration.