Bottom-Up Fabrication of Pb-Free Piezoelectric Structures Using Complex Alkoxides

Abstract

Complex of multiple metal alkoxides are impressive precursors for functional ceramic films and also micropatterns. Bonds of heterogeneous metals via oxygen can be formed in the solutions containing some mono metal alkoxides and affect the following reactions such as hydrolysis and polycondensation. Configuration of the metals and oxygen of the complex is considered to be important for control of development of crystal structures. Therefore, the fabrication using complex alkoxides as sorts of a smallest units of target structures is addressed as a bottom-up processing. In the presentation, we will discuss fabrication of the Pb-free piezoelectric films and micropatterns using several chemically-designed complex alkoxides. The precursor chemistry of the precursors was investigated as well as the crystal structure, microstructure and electrical properties of the resulting piezoelectric structures.