Synthesis of metal oxide films using liquid-phase deposition methods

Abstract

We have been studied the fabrication of the metal oxide thin films using solution process through the hydrolysis of metal-fluoro complex, the Liquid Phase Deposition (LPD) methods. We have obtained more than 30 kinds of metal oxide species as the thin films which has a dense and strong adhesion with simple equipment and any type of substrates. Due to such properties, the metal oxide is deposited on the porous, complex, and high-dimensional surface, such as micro-fabricated substrate, opal-structured polymer, and micelle structure. We report that the nano- and microscale structure of the deposited films, and the deposition process of the high dimensional structure.