Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
19th Fall Meeting of The Ceramic Society of Japan
Session ID : 2A03
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Host: The Ceramic Society of Japan

Sputtering Technology for Dielectric Material
Yutaka Nishioka, *isao Kimura, Shin Kikuchi, Koukou Suu, [in Japanese]
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Keywords: Dielectric, Sputter, FeRAM, MEMS, optical thin film, electrode
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[in Japanese]
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© The Ceramic Society of Japan 2006
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