Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
19th Fall Meeting of The Ceramic Society of Japan
Session ID : 2H04
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Host: The Ceramic Society of Japan

Low temperature preparation and electrical properties of PZT thin film by dynamic aurora PLD
*Naoki Wakiya, Toyokazu Nagamune, Ji-Won Moon, Takanori Kiguchi, Nobuyasu Mizutani, Kazuo Shinozaki
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Keywords: Dynamic aurora PLD, PZT, Seed layer, Application of magnetic field, Low temperature crystallization
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Abstract
PZT thin film was prepared by dynamic aurora PLD. THe PZT thin film was prepared on SrTiO3 buffer layer. Both the seed layer and PZT film was crystallized at 400oC. THe film grown in the magnetic field showed low leakage current and high remanent polarization of 30uC/cm2. The state of plasma in the magnetic field was examined by spectrometer.
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© The Ceramic Society of Japan 2006
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