Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2006
Session ID : 1H27
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Host: The Ceramic Society of Japan

Nano-structures and Local Strain in c-plane Polished Sapphire
*Tomohiro Saito, Tsukasa Hirayama, Takahisa Yamamoto, Yuichi Ikuhara
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Keywords: sapphire, polish, dislocation, strain, CBED, TEM
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Abstract
sapphire surfaces with c-plane were polished using several kinds of diamond slurry and colloidal silica, and the introduced damaged zones were investigated using TEM, HRTEM and TEM-CBED.
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© The Ceramic Society of Japan 2006
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