Optical Properties of Ferroelectric Films Prepared by Aerosol Deposition

Abstract

Ferroelectric Pb(Zr,Ti)O3 (PZT) films were deposited directly on glass substrates at room temperature by aerosol deposition (AD). The reflectance and transmittance for the film samples were measured using UV-NIR Spectroscopy to analyze the band structures of the PZT films. By fitting the measured data with an optical model, the band gaps of the as-deposited and annealed films were estimated. The estimated results show that the band structure of the films is changed by annealing.