Black conductive SnO2 films fabricated by a chloride pyrolysis method

Yuta Matsushima; Tsutomu Yamazaki; Kazuyuki Maeda; Takeyuki Suzuki

doi:10.14853/pcersj.2006S.0.183.0

Annual Meeting of The Ceramic Society of Japan, 2006

Session ID : 2B09

DOI https://doi.org/10.14853/pcersj.2006S.0.183.0

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Host: The Ceramic Society of Japan

Black conductive SnO₂ films fabricated by a chloride pyrolysis method

*Yuta Matsushima, Tsutomu Yamazaki, Kazuyuki Maeda, Takeyuki Suzuki

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Keywords: Tin dioxide, Conductive black film, Chloride pyrolysis method, Oxygen vacancy, Tin chloride

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Abstract

Black conductive SnO₂ films were deposited from SnCl₂ powder by a chloride pyrolysis method under suppressing oxygen supply condition. The films were characterized by XRD, EPMA, TG, SEM and Hall effects measurements. The films deposited on glass substrates showed the preferred orientation along <110>. Chlorine from SnCl₂ precursor was contaminated in the SnO₂ films. On the other hand, the black-coloring was mainly due to oxygen vacancy.

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