Preparation of Ultra thin PZT films with (111) one-axis oriented Film by MOCVD

Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan

Annual Meeting of The Ceramic Society of Japan, 2006

Session ID : 1A18L

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Host: The Ceramic Society of Japan

Preparation of Ultra thin PZT films with (111) one-axis oriented Film by MOCVD

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Keywords: MOCVD, PZT, FeRAM, Thin film

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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