Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2006
Session ID : 2G23
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Host: The Ceramic Society of Japan

Preparation of silica thin films at room temperature from polysilazane solution and change in properties under heat-treatment
Hiromitsu Kozuka, *Satoshi Mogari
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Keywords: silica, polysilazane, thin film, coating, room temperature, stress
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[in Japanese]
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© The Ceramic Society of Japan 2006
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