Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2006
Session ID : 2J22
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Host: The Ceramic Society of Japan

Low temperature crystallization of sol-gel derived TiO2 precursor thin films by O2 plasma irradiation
*Naoki Arimitsu, Akira Nakajima, Hisashi Ohsaki, Yoshikazu Kameshima, Kiyoshi Okada
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Keywords: plasma, crystallization, sol-gel, titanium dioxide, thin film
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[in Japanese]
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© The Ceramic Society of Japan 2006
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