Abstract
The system in Si-Al-O-N has some types of AlN polytypoids based on AlN structure. AlN polytypoids have characteristic structures with different stacking periods in the direction of c-axis corresponding to the amount replaced Al, N by Si, O. We focused on controlling microstructures of the porous AlN polytypoids ceramics which are fabricated by utilizing their anisotropic plate-like grain growth. In this study, the effects were investigated of raw materials, compositions and firing temperatures on porous AlN polytypoid ceramics. Consequently, a variety of porous AlN polytypoid ceramics can be fabricated by controlling them
