Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2006
Session ID : 1B32L
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Host: The Ceramic Society of Japan

Factors for determination of deposition rate of oxide films during CVD process under air atmosphere
*Shinnosuke Kawaguchi, Kei-ichi Namiki, Shigeo Ohshio, Junichi Nishino, Hidetoshi Saitoh
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Keywords: oxide film, chemical vavor deposition, deposition rate
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[in Japanese]
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© The Ceramic Society of Japan 2006
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