Preparation of ITO thin films by solution deposition - thermal decomposition method and their thermoelectric properties

Kaoru Ikeuchi; Masahiro Yasukawa; Toshio Kono

doi:10.14853/pcersj.2006S.0.397.0

Annual Meeting of The Ceramic Society of Japan, 2006

Session ID : 2P092

DOI https://doi.org/10.14853/pcersj.2006S.0.397.0

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Host: The Ceramic Society of Japan

Preparation of ITO thin films by solution deposition - thermal decomposition method and their thermoelectric properties

Kaoru Ikeuchi, *Masahiro Yasukawa, Toshio Kono

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Keywords: ITO thin film, Solution deposition - thermal decomposition method, Seebeck coefficient, Electrical conductivity

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Abstract

ITO thin films were prepared on glass substrates by solution deposition - thermal decomposition method, and their electrical conductivity and Seebeck coefficient were measured. The changes in the thermoelectric properties with the amount of doped Sn atoms are reported.

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