Effect of carrier gas species on ferroelectric properties of PZT/stainless steel by CO2 laser assisted aerosol deposition

Abstract

Pb(Zr,Ti)O₃ (PZT) thick films were deposited onto stainless steel substrates by the ADM using different kinds of carrier gases and were irradiated by CO₂ laser both during and after deposition for recovery of the ferroelectricity. The ferroelectric and dielectric properties of PZT films deposited using O₂ and N₂ gases and irradiated by CO₂ laser both during and after deposition were superior to those of films deposited using He gas and irradiated by the laser. The strain, stress and/or defects within the film were relaxed by CO₂ laser irradiation during deposition, and grain growth in the film was promoted by post-annealing using laser irradiation.