Piezoelectric Property of PZT Thick Film Determined by Using Double Beam Laser-Doppler-Interferometer and Finite Element Method

Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan

Annual Meeting of The Ceramic Society of Japan, 2006

Session ID : 3A11

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Host: The Ceramic Society of Japan

Piezoelectric Property of PZT Thick Film Determined by Using Double Beam Laser-Doppler-Interferometer and Finite Element Method

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Keywords: piezo, FEM, aerosol deposition, PZT, actuator, thick film

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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