Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2006
Session ID : 3E09
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Host: The Ceramic Society of Japan

Electrical conductivity of RuO2 film prepared by MOCVD
*Shinji Matsumoto, Teiichi Kimura, Takashi Gotou
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Keywords: MOCVD, Ruthenium Oxide, film, electrode, electrical conductivity, oxigen sensor
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[in Japanese]
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© The Ceramic Society of Japan 2006
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