Deposition of ceramic thin films by the bottom-up process

Abstract

A new method for bottom-up deposition of ceramic thin films will be reviewed. This method is based on heterogeneous nucleation and subsequent crystal growth of ceramic substances. So far, thin films including SnO2, CeO2, MnO2, FeOOH, Fe3O4 have been deposited from aqueous solutions kept at 323-343K. Hydroxyapatite coatings can also be deposited with the aid of immobilized enzyme on substrates. Scaling-up of these methods have also been attempted.