Fabrication of porous SiC with controlled pore

Abstract

Porous silicon carbide ceramics have received much attention because of their thermal and chemical stability. In this study, we prepared the macroporous silicon carbide ceramics (pore size: 100nm) and investigated their stability for the steam of high temperature. The pore size distribution was affected by the process parameter like green density, sintering temperature and additive. XPS spectra revealed that silicon oxycarbide and silica were covered on the surface of the specimens after water vapor oxidation.