Development of Organic/MoO3 Hybrid VOC Sensors using MoO3 Thin Film made by Solution Process

Abstract

We are developing new VOC gas sensors with high selectivity and sensitivity by using the layered organic/inorganic hybrids of semiconductive molybdenum oxide with organic components. We form MoO3 thin film by solution process. The film is highly b-axis orientated and can form hybrids with polyaniline(PANI). The layered PANI/MoO3 hybrids, (PANI)xMoO3, thin film sensor element can make a response to some dozens of ppb of acetaldehyde.