Abstract
Micromachined ultrasonic transducer (MUT) is one of the important applications of piezoelectric film devices. To materialize the piezoelectric micromachined ultrasonic transducer (pMUT), we investigate the preparation process of 10-m-thick disk shaped Pb1.1(Zr0.53Ti0.47)O3 films using a chemical solution deposition (CSD) process, and photolithography process. A resonant-antiresonant peak was observed around 180MHz after poling process. Oscillations of the peaks were decrease with decreasing the disk diameter. Ultrasonic frequency of the PZT disk generated with pulsar-receiver was about 110MHz, and this frequency was expected to be thickness mode oscillation.
