Fabrication and Evaluation of Piezoelectric Property of PZT and Lead-Free Piezoelectric Thick Film

Abstract

A method to evaluate piezoelectric constant d₃₃ of thick film was developed within the accuracy of less than 5% using Double Beam Laser Doppler Interferometer (DB-LDI) and Finite Element Method (FEM) analysis. In the measurement of PZT thick film, the displacements of both surfaces were 7 and 1 nm. Using these results, piezoelectric constant d₃₃ of PZT thick film was determined at 277-310pC/N. This value was considered reasonable in comparison with d₃₃=296-315pC/N that was measured by T.Iijima. And as the lead-free piezoelectric material, LF4BF ((K_0.04Na_0.52Li_0.04)(Nb_0.86Ta_0.10Sb_0.04)O₃ + BiFeO₃) thick film was fabricated by Aerosol Deposition Method (ADM). Piezoelectric properties of LF4BF thick film was measured by DB-LDI and determined piezoelectric constant d₃₃ using this method.