Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2007
Session ID : 3H05
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Host: The Ceramic Society of Japan

Crystal structure control of Al2O3 thin film prepared by Dynamic Aurora PLD
*Naoki Wakiya, Teiko Kadowaki, Keisuke Fujito, Takanori Kiguchi, Hidemitsu Takaoka, Hidemitsu Takaoka, Hisao Suzuki, Kazuo Shinozaki
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Keywords: Dynamic Aurora PLD, Alumina, thin film, Buffer layer
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[in Japanese]
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© The Ceramic Society of Japan 2007
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