Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2007
Session ID : 3H09
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Preparation of Sc2O3 films by a nearby vaporization CVD method
*Junichi NISHINOShigeo OHSHIOHidetoshi SAITOH
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Keywords: CVD, Sc2O3, fluorescence
CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© The Ceramic Society of Japan 2007
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