Abstract
The volumetric efficiency of BaTiO3-based multilayer ceramic chip capacitors (MLCCs) has been steadily improved and significant progress has been made in the solid-state synthesis of fine BaTiO3 powders by optimizing the reaction conditions especially using submicron-sized raw materials and high-dispersion technology. However, further precise diffusion-control based on the kinetics and mechanism of the solid reaction is crucial to achieve higher tetragonality applicable to future MLCC technology. For targeting boundary-technology areas between existing powder-based tape casting and advanced thin-film process, we have developed a novel powder-sintering thin film process using BaTiO3 nanocrystals to obtain a highly densified microstructure containing columnar-like grains at lower temperatures. Furthermore, the controllability of crystallographic orientations of thin films by solid phase epitaxy has been demonstrated.
