Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
21st Fall Meeting of The Ceramic Society of Japan
Session ID : 1P12
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Host: The Ceramic Society of Japan

Microstructure of Al2O3-TiO2 Ceramics for Electrostatic Chuck
*Masami Ando, Toshihiro Aoshima, Jun Miyaji
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Keywords: Electrostatic chuck, Alumina, Titanium oxide, Microstructure, Grain boundary
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[in Japanese]
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© The Ceramic Society of Japan 2008
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