Oxygen self-diffusion in BaTiO₃

Abstract

We have studied oxygen diffusion in BaTiO3 ceramics. Oxygen diffusion was carried out by vapor-solid exchange method. Oxygen tracer profile was measured by secondary ion mass spectrometry (SIMS). In order to effect of grain boundary and impurity on oxygen diffusion path, the distribution of oxygen tracer was measured by scanning ion image using fine focused Cs ion beam. We observed the blocking effect by grain boundary on oxygen diffusion.