Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
21st Fall Meeting of The Ceramic Society of Japan
Session ID : 1PH25
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Host: The Ceramic Society of Japan

Fabrication of BST thin films on alumina substrates and their properties
*Takashi Nishida, Yuta Kawakami, Takashi Nozaka, Masahiro Echizen, Hiroaki Takeda, Kiyoshi Uchiyama, Tadashi Shiosaki
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Keywords: BST, Frequency tunable device, Microwave device, sputtering, Alumina, Sol-gel
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Abstract
The BST films for microwave tunable devices have been widely researched. In order to realize practical microwave waveguide, the films deposited on low-cost substrates for microwave, such as alumina. The preparations of buffer layers and BST films are revealed, and their optimization and electrical properties are discussed.
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© The Ceramic Society of Japan 2008
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