Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
21st Fall Meeting of The Ceramic Society of Japan
Session ID : 1D25
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Host: The Ceramic Society of Japan

low temperature preparation of alpha-alumina films by semiconductor laser CVD
*Yu You, Rong Tu, Takashi Goto
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Keywords: alpha-alumina films, LCVD, Low temperature preparation
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[in Japanese]
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© The Ceramic Society of Japan 2008
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