Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
21st Fall Meeting of The Ceramic Society of Japan
Session ID : 1D28
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Host: The Ceramic Society of Japan

High speed deposition of beta - SiC films by CO2 laser enhanced MOCVD
*Kengo Fujie, Rong Tu, Takashi Goto
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Keywords: laser enhanced MOCVD, Beta-SiC, High speed deposition
CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© The Ceramic Society of Japan 2008
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