Fabrication of ZnO thin film by Spin Spray technique

Abstract

In this report, zinc oxide (ZnO) films were fabricated by using Spin Spray technique, which is consisted of spraying two kinds of solutions containing metal ion or oxidizing agent to revolving heated substrate. Though there are many advantages in this technique such as simple equipment, low-cost, low-temperature (< 100 degree C.) and high deposition rate etc..., it has almost only used to prepare spinel ferrite thin films. For the first time, Spin Spray technique was applied to prepare ZnO films.