21st Fall Meeting of The Ceramic Society of Japan
Session ID : 3H20
Conference information
Host: The Ceramic Society of Japan
Effect of the Buffer Layer Structure on the Residual Stress in alkoxide derived PZT thin film
*Tomoya Ohno, Takeshi Matsuda, Naoki Wakiya, Hisao Suzuki, Babara Malic, Maria Kosec
Author information
Keywords:
Chemical Solution Deposition,
Residual Stress,
Stress Engineering,
Ferroelectric Thin Film
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