Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
21st Fall Meeting of The Ceramic Society of Japan
Session ID : 1F20
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Host: The Ceramic Society of Japan

Fabrication and characterization of novel electronic function thin films using SiO/C hybrid targets by PLD method
*Yusaburo Ono, Yushi Kato, Naoki Shiraishi, Makoto Yamaguchi, Osami Sakata, Mamoru Yoshimoto
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Keywords: pulsed laser deposition, thin film, electronic function, carbon, silicon monoxide
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[in Japanese]
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© The Ceramic Society of Japan 2008
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