Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2008
Session ID : 1C28
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Host: The Ceramic Society of Japan

Preparation of HfO2 films on organic polymer substrates
*Kazuyuki Suzuki, Kiyotaka Tanaka, Kazumi Kato
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Keywords: hafnia, thin film, chemical solution deposition, microstructure
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[in Japanese]

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© The Ceramic Society of Japan 2008
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