Surface profiles of large area films made by aerosol deposition

Abstract

To fabricate light circuit in LSIs, aerosol deposition was used to make lead zirconate titanate (PZT) films on silicon wafers. XY scanning of nozzles was used to cover the whole wafer surfaces. Broadening beams and straight beams were compared. The cross section of broadening beams had one peak shape, while that of straight beams had shape of a plateau. The microscopic surface shape to the shift direction of the nozzles clearly showed the effect of nozzle shift in surfaces made by broadening beams. The broadening beams made films with smaller surface roughness and with better macroscopic evenness.