Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2008
Session ID : 1L31
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Host: The Ceramic Society of Japan

Structural analysis of hydrogenated amorphous carbon films using Raman scattering spectroscopy
*Yuki Ono, Naoki Gawazawa, Tsuneo Suzuki, Shigeo Ohshio, Hiroki Akasaka, Hidetoshi Saitoh
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Keywords: carbon film, CVD, XRR, density, Raman
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[in Japanese]

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© The Ceramic Society of Japan 2008
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