Host: The Ceramic Society of Japan
he chemical solution deposition method has been applied widely for multicomponent thin films. Generally, its high potential is attributable to the homogeneity of solutions. However, low affinity among conventional raw materials such as metalorganic compounds and organic solvents sometimes remains problematic. Tailoring the molecular structure of a liquid source and optimizing its solubility and reactivity for hydrolysis, condensation, and combustion would yield a precisely controlled composition, low-temperature crystallization, high phase purity, and uniform microstructure in thin and thick films deposited using the liquid sources. In particular, low-temperature crystallization is essential for integration of advanced ceramics such as ferroelectric thin films into silicon-based semiconductors and other substrates.
