Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2008
Session ID : 2H06
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Host: The Ceramic Society of Japan

Control of the behavior of surface discharge and the application to synthesis of oxide thin films
Yosuke Sonohara, Yoshihiro Shibayama, Masahiro Shikatani, Kazuya Kusama, *Masayuki Okuya
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Keywords: Surface discharge, Thin film, Zinc oxide, Patterning
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[in Japanese]

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© The Ceramic Society of Japan 2008
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