Host: The Ceramic Society of Japan
Atmosphere sensitive wide-gap pn junction: NiO/ZnO heterojunction is prepared by processing micro-rectangular holes on the heterojunction element. The electrical characteristics of the NiO/ZnO heterojunction depends on the crystal plane of ZnO substrate and NiO/ZnO(O-face) junction shows better rectifying character. The NiO/ZnO (O-face) heterojunction works as a VOC sensor at room temperature, and the current increases by introducing the acetone vapor. Effect of UV incident on the VOC gas sensing characteristics will be discussed.