Abstract
Multilayer PZT actuator is in demand for its high responsibility. In case of using Cu inner electrodes, Cu diffuses to PZT. The diffused Cu has drastic effects on piezoelectric property. Therefore, it is important to investigate about Cu behavior in PZT. In this study, we found that MgO-doped PZT-PZN showed different piezoelectric property in case of Cu diffused PZT and no PZT. MgCO3 improves the restricted grain growth caused by Cu with keeping high IR.