Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2008
Session ID : 3B20
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Host: The Ceramic Society of Japan

Fabrication and Application of MoSi2-thin-film Heaters
Masashi Sato, *Teppei Hayashi, Shinzo Yoshikado
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Keywords: MoSi2-thin-film, Si3N4 substrate, RF magnetron sputtering, heater
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Abstract
Thin-film heaters made of molybdenum silicide (MoSi2) were fabricated using RF magnetron sputtering and their heating characteristics under high vacuum were evaluated. Resistance value of the MoSi2-thin-film heater deposited on a Si3N4 substrate increased with increasing heating time. It is speculated that this deterioration is due to the formation of MoO3 in a thin film.
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© The Ceramic Society of Japan 2008
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