22nd Fall Meeting of The Ceramic Society of Japan
Session ID : 1A21
Conference information
Host: The Ceramic Society of Japan
Enhancement of piezoelectric response in ScxAl1-xN thin films prepared by dual cosputtering
*Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano, Akihiko Teshigahara, Yukihiro Takeuchi, Nobuaki Kawahara
Author information
Keywords:
Piezoelectric response,
AlN thin films
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