Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
22nd Fall Meeting of The Ceramic Society of Japan
Session ID : 1PA08
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Host: The Ceramic Society of Japan

Fabrication and Characterization of Crystalline SrTa2O6 Thin Films for MIM Capacitor Using Chemical Solution Deposition Method
*Li Lu, Masahiro Echizen, Takashi Nishida, Kiyoshi Uchiyama, Yukiharu Uraoka
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Keywords: Chemical Solution Deposition Method, SrTa2O6, Dielectric Properties
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[in Japanese]
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© The Ceramic Society of Japan 2009
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