Abstract
The site selective analysis of BaTiO3 by Cs-corrected STEM-EDS was performed in order to identify substitution sites of rare earth elements. It was found that Sm ion which was relatively large replaced A site, and Yb ion which was relatively small replaced B site. Dy and Y ion seemed to replace both sites, and the site preference seemed to depend on other additional ions. This technique is available as the confirmation method of substitution site control.