Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 2A01A
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MOCVD Growth of Dielectric Films and Their Physical Properties
*Hiroshi Funakubo
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Keywords: MOCVD, dielectric
CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
[in Japanese]
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© The Ceramic Society of Japan 2009
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