Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 2A06
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Host: The Ceramic Society of Japan

Effects of HIP treatment on Properties of PbMg0.047Nb0.095Zr0.416Ti0.442O3 Thin Films Fabricated by MOD
*Daisuke Horii, Yuki Hasegawa, Masafumi Kobune, Yusuke Daiko, Atsushi Mineshige, Tetsuo Yazawa
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Keywords: HIP treatment, MOD, piezoelectric, thin film
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Abstract

PbMg0.047Nb0.095Zr0.416Ti0.442O3 (PMNZT) films were fabricated using a spin-coating technique onto Pt(100)/MgO(100) substrates by metalorganic decomposition (MOD). The PMNZT films HIP-treated at 49-196 MPa were characterized by x-ray diffraction (XRD), transmission electron microscopy (TEM) and piezoelectric response microscopy (PFM). The PMNZT films HIP-treated are shown to be potential and reliable materials for piezo- and ferroelectric applications such as actuators and resonators.

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© The Ceramic Society of Japan 2009
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